Semiconductor Specialty Gas Systems—End-to-End Engineering Logic from Design to Delivery

Custom Manufacturing of GC Specialty Gas Cabinets

Gas cabinets serve as the source equipment for specialty gas systems. The cabinet structure, ventilation mode, valve assembly configuration, and control system are customized based on the type of gas, the number of cylinders, and the safety rating. The internal piping is fabricated using fully automated track welding, and key components are assembled in accordance with process requirements to ensure the equipment is ready for stable operation upon shipment.

                                                                                                                                                                                         Shenzhen WoflyTechnology Special Gas Cabinet Display

Modular Assembly of VMB Valve Boxes
Valve manifold boxes perform pipeline distribution and branch control functions. They are designed modularly based on the number of gas lines and connection specifications, and integrate pressure monitoring, valve operation, and labeling systems. The assembly process adheres to cleanroom assembly standards; after internal piping connections are completed, each module undergoes individual airtightness testing to ensure the independent operability of each module.

                                                                                                                                      —Shenzhen Wofly Technology VMB Showcase—

Integration of Gas Purification and Filtration Units
End-of-line purifiers and gas filters are installed before the gas enters the process equipment to remove moisture, oxygen, and particulate impurities. The purification principle is selected based on the gas type, and the system is configured with functions to monitor the pressure differential between the inlet and outlet and provide replacement alerts. During the equipment integration phase, connections to the main pipeline are completed to ensure that the purification units can be maintained independently without affecting the operation of the main system.

                                                             -Gas Purification System-

Factory Testing and Performance Verification
Before each unit leaves the factory, it undergoes a series of tests, including a visual inspection, piping airtightness testing, functional logic verification, and safety interlock testing. Test records are archived to ensure that the equipment’s performance aligns with the design specifications. This standardized factory inspection process reduces on-site commissioning time and ensures consistent delivery quality.

                                   -Shenzhen Wofly Technology Class 1,000 Cleanroom-

On-Site Construction and Delivery

                         —Photographed at the Shenzhen Wofly Technology construction site—

01 Piping Welding and Clean Installation
On-site piping installation utilizes fully automated rail-guided TIG welding, with a continuous supply of shielding gas during the welding process to ensure the inner walls of the welds remain smooth and free of oxidation. Piping is laid in accordance with the design drawings, and the spacing of fasteners as well as the placement of supports and hangers comply with code requirements. A clean construction environment is maintained throughout the process to prevent foreign objects from entering the piping system.

02 System Purge and Leak Testing
Upon completion of piping installation, high-purity nitrogen (N₂) is used to purge the system in sections to remove residual impurities and particles from the pipes. This is followed by a comprehensive leak test, involving stepwise pressure increases and holding at each pressure level to detect leaks at all connection points. Test results are documented and serve as critical evidence for system handover.

03 Gas Purge and Particle Size Control
Prior to official gas commissioning, multiple gas purge cycles are performed to gradually replace the air and moisture within the piping with the target process gas. Gas purity parameters are continuously monitored during the purge process, and the system is not released for use until process requirements are met. Particle size testing is conducted simultaneously to verify the system’s cleanliness level.

04 Final Acceptance and Operations & Maintenance Support
After the system passes all functional tests and safety verifications, a final acceptance inspection is organized. Complete as-built drawings, test reports, and operation and maintenance manuals are delivered. Follow-up services, including periodic inspections, spare parts replacement, and technical support, are provided to ensure the stable operation of the specialty gas system during long-term production.

                                                                                                                      —Photographed at the Shenzhen Wofly Technology construction site—